Dimes Technology Center a part of the Dimes Research School
Our special MEMS modules enables high level 3D structuring.
We also work with many non standard materials.
Our strength is to integrate all these technologies to on-chip and multi-
We are able to fabricate:
- MEMS devices
- Unique active devices
- Gas/Liquid injection systems
- Biomedical systems
- and many more
DimesTC is very flexible in tailoring its processes to your needs. We work closely with expert groups throughout the university and we have strong ties with relevant research groups and equipment manufacturers in the world. If you like to use our facilities for making microsystems, nanoelectronics or for microfabrication, please contact our Director: Dr. Carel van der Poel.
General info: +31-15-2786234
New Director DTC
As of 1 April 2013, Dr.Carel van der Poel has been appointed director of the Dimes Technology Center.
Carel has been Director of R&D NL of FEI Company,Manager of the Process and Library Sector of NXP and Vice President of Philips Research.
New Plasma Etchers for DTC
DTC bought a new DRIE etcher from SPTS: an Omegai2L Rapier.
This system will take the load of our existing DRIE etcher: the Adixen AMS100 that needs often repair and maintenance. In this way the equipment downtime will go down considerabaly. The purchase was done in close cooperation with the Kavli Institute of Nanoscience.
DTC also bought a refurbished LAM RIE etcher as a replacement for our Drytek Triode 384T etcher.
DTC bought a Primaxx uEtch HF vapor etcher from SPTS.
Dimes Brochure 2012/ Annual Report 2011
2/3 may 2013
6/7 june 2013
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